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Posts Tagged ‘MEMS’

Microelectromechanical systems (MEMS)MEMS is the technologies and devices combining micromechanical and microelectronic components.MEMS devices are usually made on a silicon substrate using micro-processing technology, identical to the technology of production of single-chip integrated circuits.Despite the fact that the electronics industry provides large-scale demand for silicon industry products, crystalline silicon is still a complex and relatively expensive material to produce. On the other hand, polymers can be produced in large quantities, with a wide variety of material properties.MEMS devices can be made of polymers with use of such processes as injection molding, stamping or stereolithography. Typical sizes of micromechanical elements lie in the range from 1 micrometer to 100 micrometers, while the crystal size of MEMS microcircuits have dimensions from 20 micrometers to one millimeter.Currently MEMS technology is already used to manufacture various microcircuits. MEMS technologies are used to design various miniature sensors such as accelerometers, angular velocity sensors, gyroscopes, magnetic sensors, barometric sensors, environment analyzers.
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